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以硅酸四乙酯(TEOS)和甲基三乙氧基硅烷(MTEOS)为前驱材料,用溶胶 凝胶(sol gel)方法在钛宝石表面 制备得到均匀性良好且具有高激光损伤阈值的有机硅复合凝胶增透膜。膜层在钛宝石激光器输出波段(750～850 nm)的增透效果显著,其平均透过率超过98.6%;激光破坏阈值为2.2J/cm2(800nm,300ps);膜层表面均匀性达 到激光波面的要求,在皮秒、飞秒超短脉冲高功率激光领域具有应用价值。溶胶的性能测试结果表明,溶胶粘度和 成膜折射率均随溶液中CH3SiO1.5溶胶体含量的增加而增大,而膜层折射率受烘烤温度影响较小。
The organic silicon tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTEOS) as precursors were prepared by sol-gel method on the surface of titanium sapphire with good homogeneity and high laser damage threshold Silicon composite gel AR coating. The antireflection effect of the film in the output band of the sapphire laser (750-850 nm) is remarkable, with an average transmittance of more than 98.6%. The laser damage threshold is 2.2 J / cm2 (800 nm, 300 ps) Wave surface requirements, in picosecond, femtosecond ultra-short pulse high-power laser field with application value. Sol performance test results show that the viscosity of the sol and the refractive index of the film with the solution of CH3SiO1.5 sol content increases, while the refractive index of the film is less affected by the baking temperature.