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研究开发了一种新型压电驱动二自由度纳米级微定位工作台。文章采用静力学理论对微动工作台的运动副进行了建模分析 ,推导出直角平行板柔性铰链的刚度计算表达式。采用有限元分析方法 ,对柔性铰链和微动工作台的静、动态力学特性数值分析 ,并对微动工作台的模态频率进行了实验测试。理论分析、有限元计算和实验结果的一致性说明理论分析的正确性和数值分析的可靠性
Research and development of a new type of piezoelectric driven two-degree-of-freedom nano-positioning micro-positioning table. In this paper, static analysis is used to analyze the kinematic pair of the micro-motion table, and the stiffness expression of the right-angled parallel plate flexural hinge is derived. The finite element analysis method is used to analyze the static and dynamic mechanical properties of the flexible hinge and the micro-motion table. The modal frequencies of the micro-motion table are tested experimentally. The theoretical analysis, the consistency between the finite element analysis and the experimental results show the correctness of the theoretical analysis and the reliability of the numerical analysis