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陕西机械学院晶体生长设备研究所已在研制TDR～62型单晶炉,预计于87年投入运行。 炉将用于拉制φ4～5时硅单晶材料,它兼容硬轴和软轴两种形式,是我国当前单晶炉产品系统中又一代新型单晶炉。其特点是: (1)采用微机控制的先进技术和全新控制元件,使该产品的主要参数和性能接近或达到国际先进水平,并适合国情;
Shaanxi Institute of Machinery Institute of Crystal Growth Equipment in the development of TDR ~ 62 crystal furnace, is expected to be put into operation in 1987. The furnace will be used to draw φ4 ~ 5 when the silicon single crystal material, it is compatible with hard axis and flexible shaft in two forms, is China’s current single crystal furnace product system in the next generation of new single crystal furnace. Its features are: (1) the use of advanced computer control technology and new control components, so that the main parameters of the product and performance close to or reach the international advanced level, and suitable for the national conditions;