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采用溶胶 -凝胶法成功的制备了纳米TiO2 粉末 ,研究了工艺条件对纳米TiO2 物相的影响 ,利用已经制备好的纳米TiO2 粉末制备出了纳米TiO2 氧敏元件 ,并对纳米TiO2 敏感元件的电阻 -温度特性、敏感特性、掺杂与电阻的关系等进行了测试。结果表明 ,实验制备的纳米TiO2 敏感元件具有较好的氧敏特性 ,而且掺杂可以有效地降低元件的电阻率并可显著地改善元件的电阻 -温度特性。
The nano-TiO2 powder was successfully prepared by the sol-gel method, the influence of the technological conditions on the nano-TiO2 phase was studied, the nano-TiO2 oxygen sensor was prepared by using the prepared nano-TiO2 powder, Resistance - temperature characteristics, sensitivity characteristics, the relationship between doping and resistance were tested. The results show that the prepared nano-TiO2 has good oxygen sensitivity and doping can effectively reduce the resistivity of the device and can significantly improve the resistance-temperature characteristics of the device.