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提出了一种新颖的基于权值的微机械数模转换器 ,它的原理与电路中的权电阻数模转换器类似。通过改变纵向梁的长度获得不同的刚性值作为比例因子 ,从而实现由二进制电压输入到模拟位移输出的转换。为了减小误差 ,对结构作了优化设计 ,同时还考虑并解决了零稳定性问题 ,提高了输出位移的精度。文中给出了有限元方法对由热执行器阵列驱动的数模转换器的输出位移分析的结果 ,并对几种微机械数模转换器的设计进行了比较。
A novel weight-based micromechanical digital-to-analog converter is proposed, whose principle is similar to that of the resistance-to-resistance digital-to-analog converter in the circuit. By varying the length of the longitudinal beam, different stiffness values are obtained as a scaling factor to allow conversion from a binary voltage input to an analogue displacement output. In order to reduce the error, the structure has been optimized design, and also consider and solve the problem of zero stability and improve the accuracy of the output displacement. In this paper, the finite element method is used to analyze the output displacement of a digital-analog converter driven by a thermal actuator array. The design of several micromechanical digital-to-analog converters is compared.