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通过反应磁控溅射法分别沉积了不同Ag含量(Ag/(Ag+Cr)=2.9~21.2%(原子比))的CrN/Ag复合膜,采用能谱仪、X射线衍射仪、纳米压痕仪、扫描电镜、摩擦磨损仪等研究了CrN/Ag复合膜的化学成份、微观结构、力学性能及摩擦磨损性能。结果表明:CrN/Ag薄膜为面心立方结构,由fcc-CrN及fcc-Ag构成。薄膜晶粒尺寸随Ag含量的升高逐渐降低。薄膜硬度随Ag含量的升高先升高后降低,当Ag含量为8.3%时,薄膜硬度最高,其最高值为23 GPa。薄膜硬度受细晶强化与软质Ag相的共同作用。CrN/Ag薄膜平均摩擦系数及磨损率随Ag含量的升高先降低后升高,当Ag含量为8.3%时,薄膜平均摩擦系数与磨损率最小,其最小值分别为0.50和0.68×10~(-8)mm~3。/N·mm。薄膜平均摩擦系数及磨损率主要受低剪切强度Ag含量和H/E值的影响。
The CrN / Ag composite films with different Ag contents (Ag / (Ag + Cr) = 2.9 ~ 21.2% (atomic ratio)) were deposited by reactive magnetron sputtering method using energy dispersive spectroscopy, X-ray diffraction, The chemical composition, the microstructure, the mechanical properties and the friction and wear properties of the CrN / Ag composite film were studied. The results show that the CrN / Ag film is a face-centered cubic structure composed of fcc-CrN and fcc-Ag. The grain size decreases with the increase of Ag content. The film hardness first increases and then decreases with the increase of Ag content. When the Ag content is 8.3%, the film hardness is the highest, with the highest value of 23 GPa. Film hardness by fine grain strengthening and soft Ag phase together. The average friction coefficient and wear rate of CrN / Ag films first decreased and then increased with the increase of Ag content. When the content of Ag was 8.3%, the average friction coefficient and wear rate of CrN / Ag films were the lowest, the minimum values were 0.50 and 0.68 × 10 ~ (-8) mm ~ 3. / N · mm. The average friction coefficient and wear rate of the film are mainly affected by the Ag content and H / E value of the low shear strength.