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1引言微型化是制造业未来10年发展面临的挑战和动力。人类社会的进步,特别是人们对于日用消费新产品的需求,促使精密光机电技术迅猛发展。现有
1 Introduction Miniaturization is the challenge and impetus for the manufacturing industry in the next 10 years. The progress of human society, especially the demand for new products for daily consumption, has led to the rapid development of precision optical and electromechanical technologies. existing