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近年来随着半导体产业的飞速发展,探针卡发展也取得了很大进步。主要阐述了探针卡的发展现状,以悬臂测试卡为例介绍探针卡测试原理、基本构造及维护方法,并针对目前悬臂探针卡存在的问题,结合实际工作经验提出改良方法。
In recent years, with the rapid development of the semiconductor industry, probe card development has also made great progress. This paper mainly expounds the development status of probe card, introduces the probe card test principle, basic structure and maintenance methods with the example of the cantilever test card. In view of the existing problems of the cantilever probe card, the improved method is put forward according to the practical work experience.