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本文综述原理、特征、功能不同的表面分析法,并互相作了比较,同时扼要介绍表面分析装置多机联用这一表面分析发展的新特点。
In this paper, the principles, features and different surface analysis methods are summarized and compared with each other. At the same time, a brief introduction of the new features of multi-machine surface analysis of surface analysis device is presented.