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研究了Ni MoS2 自润滑层在不同工艺条件下的结构特征、形貌 ,并分析其摩擦特性 ,发现润滑层表面粗糙度和厚度对摩擦系数影响较大 ;即使MoS2 含量较少 ,Ni MoS2 复合镀层的极限剪切模量也比金属Ni降低很多。这为LIGA技术制造自润滑MEMS器件提供了有益的参考 ,并提供低MoS2 含量的Ni MoS2 复合材料的一些基本性质。
The structure and morphology of NiMoS2 self-lubricating layer under different technological conditions were studied. The friction characteristics of NiMoS2 self-lubricating layer were studied. It was found that the surface roughness and thickness of the lubricating layer had a great influence on the friction coefficient. Even if the MoS2 content was low, The ultimate shear modulus is also much lower than that of metal Ni. This provides a useful reference for manufacturing self-lubricating MEMS devices by LIGA technology and provides some basic properties of Ni MoS2 composites with low MoS2 content.