SPUTTER-DEPOSITED NiTi thin films are becoming more and more important because of their po-tential applications to the intelligent thin-film systems. The as-deposited NiTi thin films pre-pared by magnetron sputtering are generally amorphous. Because the amorphous NiTi thinfilms cannot show shape memory effect, they should be crystallized under appropriate anneal- SPUTTER-DEPOSITED NiTi thin films are more and more important because of their po-tential applications to the intelligent thin-film systems. The as-deposited NiTi thin films pre-pared by magnetron sputtering are generally amorphous. show shape memory effect, they should be crystallized under appropriate anneal-