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制备了Z rN薄膜,通过采用二次正交旋转组合试验设计方案,建立了薄膜颜色和氮气浓度、靶功率与镀膜时间的数学模型,给出了各参数对薄膜颜色的影响趋势。经模型寻优,求出了在不同目标色度坐标下的最优参数组合方案。
The Z rN thin films were prepared. The mathematical model of film color and nitrogen concentration, target power and deposition time were established by using quadratic orthogonal rotation combination design. The influence of each parameter on the color of the films was also given. After optimization of the model, the optimal combination of parameters under different target chromaticity coordinates is obtained.