论文部分内容阅读
利用背散射电子衍射(EBSD)技术分析了银薄膜中出现的晶粒异常生长现象,确定了其与孪晶和织构的关系。结果表明,较强〈111〉织构形成时,孪晶面之一可平行于薄膜表面,频繁的孪生不明显改变较强的〈111〉织构,但可能造成出现六角锥体;初步分析认为,六角锥体是一对孪晶,表面是两个晶粒的六个{111}面;当制备或生长条件不能形成强〈111〉织构时,孪晶面不平行于薄膜表面,孪生后的取向继续偏离〈111〉。
The phenomenon of abnormal grain growth in silver thin film was analyzed by backscattered electron diffraction (EBSD) technique, and its relationship with twins and texture was determined. The results show that one of the twin planes can be parallel to the surface of the film when the strong <111> texture is formed, while the frequent twin does not obviously change the strong <111> texture, but hexagonal pyramids may occur. According to the preliminary analysis, The hexagonal pyramids are a pair of twins whose surfaces are six {111} planes of two grains; when the preparation or growth conditions do not result in a strong <111> texture, the twin plane is not parallel to the film surface and the twin The orientation continues to deviate from <111>.