随着科学技术的飞速发展,现代工业对一些零件的加工精度要求越来越高,因而对使用的数控设备和测量仪器等的精度和分辨率也提出了相应的要求,有的已达0.1微米,甚至更高。在这些设备中广泛地采用计量光栅作为检测元件。为了获得高的分辨率,增加光栅刻线的密度是一种方法,但是受到制造工艺和使用条件等的限制,所以计量光栅刻线只 With the rapid development of science and technology, modern industry has become increasingly demanding on the machining accuracy of some parts. Therefore, the accuracy and resolution of numerical control equipments and measuring instruments used are also put forward corresponding requirements. Some of them have reached 0.1 micron Or even higher. Metrological gratings are widely used as detection elements in these devices. In order to obtain high resolution, increasing the density of the grating reticle is a method, but by the manufacturing process and the use of conditions and so on, so the metering grating reticle only