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在普通850nm垂直腔面发射激光器基础上制备了表面等离子体调制的纳米孔径垂直腔面发射激光器.当小孔直径为200nm,周围光栅的周期为400nm时,在15mA驱动电流下最大输出光功率达到了0.3mW.介绍了该器件的制备工艺,并从实验和理论两方面分析了周期性光栅结构对光束的约束作用.
The surface plasmon-modulated nano-aperture vertical cavity surface-emitting laser was prepared on the basis of a conventional 850nm vertical cavity surface-emitting laser. When the aperture diameter was 200nm and the period of the surrounding grating was 400nm, the maximum output optical power reached at a driving current of 15mA 0.3mW.The preparation process of the device is introduced, and the constraint effect of the periodic grating structure on the light beam is analyzed both experimentally and theoretically.