C + ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon (DLC) film.With the help of a series of experiments such as Raman spectroscopy, FT- IR spectroscopy, AFM and nanoindentation, the DLC film has been recognized as hydrogenated DLC film and its tribological properties have been evaluated.The ball-on-disc testing results show that the hardness and the tribological properties of the DLC film produced by C + ion beam-assisted deposition are improved significandy.DLC film produced by C+ ion beam-assisted deposition is positive to have a prosperous tribological application in the near future.