Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moiré method. Micro holes and lines are firstly etched for parameter study. Grating profile is theoretically optimized to form high quality moiré patterns. For a demonstration, a parallel grating is fabricated on a specimen of quartz glass. The minimum line width and the distance between two adjacent lines are both set to be 1 μm, and the frequency of grating is 500 lines/mm. The experimental results indicate that the quality of gratings is good and the relative error of the gratings pitch is about1.5%. Based on moiré method, scanning electron microscope(SEM) moiré patterns are observed clearly,which manifests that gratings fabricated with the femtosecond laser exposure is suitable for micro scale deformation measurement. Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moiré method. Micro holes and lines are developed etched for parameter study. Grating profile is theoretically optimized to form high quality moiré patterns. fabricated on a specimen of quartz glass. The minimum line width and the distance between two adjacent lines are both set to be 1 μm, and the frequency of grating is 500 lines / mm. The experimental results that that quality of gratings is good and the relative error of the gratings pitch is about 1.5%. Based on moiré method, scanning electron microscope (SEM) moiré patterns are observed clearly, which manifests that gratings fabricated with the femtosecond laser exposure is suitable for micro scale deformation measurement.