为了降低紫外固化系统光源的热辐射,根据光学薄膜理论,以HfO_2、AlF_3和Cr作为镀膜材料,采用反射与吸收相结合的结构,设计了紫外高反射、可见/近红外高吸收的滤光膜。通过在基底和膜系之间增镀Al膜作为过渡层,提高了薄膜的牢固性。通过优化工艺参数,研制了220~400nm波段平均反射率为90.6%、420~2000nm波段平均吸收率为92.4%的滤光膜。 In order to reduce the heat radiation of the light source of UV curing system, according to the theory of optical thin film, HfO_2, AlF_3 and Cr are used as the coating materials and the combination of reflection and absorption is adopted to design a UV-reflective, visible / near- . By adding Al film as a transition layer between the substrate and the film system, the firmness of the film is improved. By optimizing the process parameters, the average reflectivity of 220 ~ 400nm band was 90.6%, and the average absorption of the band of 420 ~ 2000nm was 92.4%.