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本文主要介绍我们研制的ＣＢＥ气态源炉和在我们与沈阳科学仪器厂联合研制的 ＣＢＥ系统上的使用结果。并简介国际上气态源炉的研制概况。
This article mainly introduces the CBE gas source furnace that we developed and the result of using on the CBE system jointly developed by us and Shenyang Scientific Instrument Factory. And brief introduction of the international development of gaseous source furnace overview.