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文中从化学结构和官能团特性推出了卤元素Si-SiO_2系统中可动离子钝化的模型和氢离子存在状态,满意地解释了有关各种钝化现象。
In this paper, the model of Mo + passivation and the existence of hydrogen ions in Halogenated Si-SiO_2 system are introduced from the characteristics of chemical structure and functional groups, and the various passivation phenomena are satisfactorily explained.