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在生物医学、化学液体的流量检测与分析及固态元器件冷却等领域中 ,均需要流量的精细控制和检测系统。在这类流量精细控制和检测系统中 ,微小型泵是一个基本元件。作者利用上海交通大学研制成功的、由微细加工工艺制备的、直径为2mm的电磁型微马达作驱动源 ,并配以电火花加工工艺制备的蜗壳和Ti合金叶轮制成旋转式微泵。微泵的外形尺寸为Φ4 5× 6 5mm ,最大流量可达 1 2ml/min ,流量可根据马达转速进行调节。
In biomedical, chemical liquid flow detection and analysis, and solid-state component cooling and other fields, require fine-grained flow control and detection systems. In this type of flow fine control and detection system, the micro-pump is a basic component. The author made use of electromagnetic micro-motor with a diameter of 2mm, which was successfully developed by Shanghai Jiaotong University and was made by micro-machining technology, and equipped with a volute and Ti alloy impeller made by EDM to make a rotary micro-pump. Micropump dimensions Φ4 5 × 6 5mm, the maximum flow of up to 12ml / min, the flow rate can be adjusted according to the motor.