Preparation of Large Area Double Sided YBCO Thin Films by DC Magneton Sputtering

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Tc, Jc and Rs properties of large area double sided YBCO thin films deposited on LaAlO3 substrates by direct current sputtering were reported.Film thickness of the obtained thin films is over 300 nm, Tc > 90 K; Rs can be as low as less than 1.0 mΩ(77 K, 10 GHz).Homogenousity of the properties around the plane was studied.Under the measnous distributions.Influences of substrate temperature and Ar and O2 pressures on properties of the double-sided thin films were discussed.
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