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本文采用真空阴极电弧沉积方法，研究在成型Ｔｉ箔上沉积类金刚石（ＤＬＣ）膜以制备ＤＬＣ／Ｔｉ复合扬声器振膜过程中，Ｔｉ箔性能与组织的变化时发现，镀膜前的“轰击”处理使Ｔｉ箔发生完全再结晶，基体显微硬度下降；随后的镀膜过程使基体显微硬度回升，其回升幅度主要与沉积速率、沉积温度、膜层厚度等因素有关。伴随硬度的回升，显微组织出现进一步的细化。沉积ＤＬＣ膜过程中的这种“双重强化”效应在实际场合中是十分有用的。
In this paper, vacuum cathodic arc deposition method was used to study the properties and microstructure changes of Ti foil during the deposition of diamond-like carbon (DLC) film on the formed Ti foil to fabricate the DLC / Ti composite loudspeaker diaphragm. It was found that the “bombardment” The Ti foil completely recrystallizes and the microhardness of the substrate decreases. The subsequent microhardness recovery of the substrate increases with the deposition rate, deposition temperature and film thickness. With the rebound of hardness, the microstructure appears further refinement. This “double enhancement” effect during the deposition of DLC films is very useful in practical situations.