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通过X光电子能谱(XPS)、阳极氧化电压谱(AVS)和Fiske台阶电压的测量,研究了约瑟夫森结中AlOxAl隧道势垒.发现结的隧道势垒最佳沉积Al层厚度为7nm,Al上形成AlOx厚度只取决于氧化条件,与沉积Al厚无关,势垒Al氧化物可能含有一个像AlOOH态的OH基团.同时,估算了剩余Al厚度,证实了结中Al/Nb间在42K时,由常态Al而产生临近效应的存在
The X-ray photoelectron spectroscopy (XPS), anodic oxidation voltage spectrum (AVS) and Fiske step voltage measurements were used to study the AlOxAl tunnel barrier in the Josephson junction. It is found that the optimum deposited Al layer thickness of junction tunnel barrier is 7 nm. The thickness of AlOx formed on Al depends only on the oxidation conditions. Al barrier layer Al oxide may contain an OH group like AlOOH regardless of the thickness of Al deposited. At the same time, the remaining Al thickness was estimated, confirming the existence of the proximity effect caused by normal Al at 4 2K between the Al / Nb junctions