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利用压电陶瓷致动器作为驱动元件设计了X-Y两自由度精密定位工作台,并利用有限元分析法对机构进行了优化设计,采用电阻应变片作为微位移检测传感器,在此基础上设计了闭环控制器,该控制器包括压电陶瓷驱动单元、微位移传感器检测单元和中央处理单元,最后利用PID控制法进行了闭环控制实验研究。实验结果表明,本系统具有较好的控制品质和优异的动态性能,在对10μm×10μm两自由度工作台的控制中,闭环控制精度达10nm,阶跃响应的稳定时间小于8ms。
The use of piezoelectric ceramic actuator as the driving element designed XY two degrees of freedom precision positioning table, and the use of finite element analysis of the mechanism for the optimal design, the use of resistance strain gauges as a micro-displacement detection sensor, on this basis designed Closed-loop controller. The controller includes a piezoelectric ceramic drive unit, a micro-displacement sensor detection unit and a central processing unit. Finally, a closed-loop control experimental study is carried out by using the PID control method. The experimental results show that the system has good control quality and excellent dynamic performance. In the control of 10μm × 10μm two-DOF workbench, the closed-loop control accuracy is up to 10nm, and the step response stability time is less than 8ms.