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探讨了三光束干涉绝对距离测量的原理,推导了公式,对Fourier变换技术和参考技术的联合使用进行了研究。提出了一种直接进行信号处理的新方法,给出了系统构成和测量结果。
The principle of absolute distance measurement of three-beam interference was discussed. The formula was derived and the combination of Fourier transform and reference technology was studied. A new method of direct signal processing is proposed, and the system configuration and measurement results are given.