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分流器是气体质量流量控制器中的一个重要部件。分流器是否合适将对气体质量流量控制器的性能指标,如精度、线性等重要指标参数有直接的影响。合适的分流器能够改善产品的精度、线性等性能指标;反之,不合适的分流器将会使得产品的精度、线性等指标参数超差,最终导致产品成为不合格品。为解决分流器的设计问题,本文根据流体力学的理论,建立气体质量流量控制器的分流器的数学模型。该模型能够为分流器的设计和计算提供理论依据。
Splitter is an important part of the gas mass flow controller. The suitability of the diverter will have a direct impact on the performance parameters of the gas mass flow controller, such as accuracy, linearity and other important parameters. Appropriate shunt can improve the accuracy, linearity and other performance indicators; on the contrary, improper shunt will make the product accuracy, linearity and other indicators of the parameters of the ultra-poor, and ultimately lead to product nonconforming product. In order to solve the design problem of shunt, this paper establishes the mathematical model of shunt of gas mass flow controller according to the theory of fluid mechanics. The model can provide a theoretical basis for the design and calculation of shunt.