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本文简要介绍了近年研制出的几种主要类型负离子源及其工作原理,重点是等离子溅射型重金属负离子源。概述了这些负离子源在材料科学中的应用前景,如离子注入和薄膜淀积等。
This article briefly introduces several main types of negative ion sources developed in recent years and their working principle. The emphasis is on plasma-sputtered heavy metal anion sources. The applications of these negative ion sources in materials science are outlined, such as ion implantation and thin film deposition.