利用器件与工艺综合的思想 ,开发出自顶向下的新的器件和工艺设计方法 ,实现了该设计方法的MOSPAD软件 ,并利用MOSPAD系统做出了一定的综合结果 .做出了关于器件与工艺综合的两个实例 ,即对FIB器件的器件综合和对阱形成工艺模块进行的工艺综合 ,并证明了自顶向下的器件与工艺综合思想的可行性 . Utilizing the idea of ​​device and process synthesis, we developed a new top-down device and process design method, realized the MOSPAD software of the design method, and made some comprehensive results using the MOSPAD system. Two examples of synthesis, device synthesis of the FIB device and process synthesis of the well-forming process module, and the feasibility of a top-down synthesis of devices and processes are demonstrated.