对共面波导谐振腔稳频振荡器进行了实验研究。在对不加谐振腔的简单振荡器研究的基础上，设计并制作了反馈型和传输型谐振腔稳频振荡器。首先，稳频谐振腔分别用常规导体介质基片和在ＺｒＯ衬底上的金膜来实现。然后，用ＬａＡｌＯ３介质衬底上的ＹＢＣＯ超导薄膜制作的共面波导稳频谐振腔嵌入振荡器电路，利用其高品质因数取得较好的稳频效果。所有电路的有源器件均采用ＮＥ７２０８４ＧａＡｓＭＥＳＦＥＴ。 An experimental study of coplanar waveguide resonant frequency stabilization oscillator was carried out. Based on the research of the simple oscillator without resonator, the feedback-type and transmission resonator are designed and fabricated. First, the frequency-stabilized resonator is implemented with a conventional conductor dielectric substrate and a gold film on a ZrO substrate, respectively. Then, a coplanar waveguide frequency-stabilized resonant cavity fabricated by YBCO superconducting thin film on a LaAlO3 dielectric substrate is embedded into an oscillator circuit, and a good frequency-stabilizing effect is obtained by using its high quality factor. Active devices for all circuits use the NE72084GaAsMESFET.