金刚石膜微结构的慢正电子束测量研究

来源 :化学物理学报 | 被引量 : 0次 | 上传用户：schunter

【摘要】

：

用慢正电子束辅助以拉曼光谱方法对一批较高质量的PECVD金刚石膜的微结构进行测量研究.拉曼光谱实验结果显示,这批金刚石膜中金刚石相含量比较高,正电子湮没实验进一步从微观

【作者】

：

徐燕翁惠民叶邦角周海洋王海云彭成晓郗传英成斌

【机构】

：

中国科学技术大学近代物理系

【出处】

：

化学物理学报

【发表日期】

：

2004年期

【关键词】

：

金刚石膜缺陷慢正电子扩散长度 Diamond film Defect Slow positron Diffusion

【基金项目】

：

国家自然科学基金;国家高技术研究发展计划(863计划)

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论文部分内容阅读

用慢正电子束辅助以拉曼光谱方法对一批较高质量的PECVD金刚石膜的微结构进行测量研究.拉曼光谱实验结果显示,这批金刚石膜中金刚石相含量比较高,正电子湮没实验进一步从微观结构上指出各个金刚石膜之间存在很大差异,并且从缺陷角度发现各样品中缺陷尺寸和缺陷浓度不一样,造成膜质量不同.S-E曲线变化趋势反映出各样品金刚石晶体结构存在明显不同.这表明正电子湮没技术是测量金刚石膜微结构的有力手段.

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金刚石膜微结构的慢正电子束测量研究

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