用四极栅能量分析器对样品进行表面分析,既可以得到表面的低能电子衍射图,又可以得到表面俄歇电子信息。但是由于四极栅能量分析器本身结构所限,其灵敏度和信噪比较之筒镜能量分析器为低。为弥补其不足,我们用微机及A/D、D/A技术对表面电 The surface analysis of the sample with a quadrupole grid energy analyzer can not only obtain the surface low-energy electron diffraction pattern, but also obtain the surface Auger electron information. However, due to the structure of the quadrupole grid energy analyzer itself, the sensitivity and signal-to-noise ratio of the quadrupole energy analyzer is lower than that of the cylinder energy analyzer. To make up for its deficiencies, we use microcomputer and A / D, D / A technology on the surface of electricity