【摘 要】
：
研究了由等离子体活化反应系统(P—PSG)淀积的磷硅玻离膜。分析了对应不同淀积参数的P—PSG的基本特征。在该等离子体淀积方法中,利用反应气体SiH_4、PH_3和N_2O进行淀积, P
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研究了由等离子体活化反应系统(P—PSG)淀积的磷硅玻离膜。分析了对应不同淀积参数的P—PSG的基本特征。在该等离子体淀积方法中,利用反应气体SiH_4、PH_3和N_2O进行淀积, P—PSG有高的淀积速率〔大约为百分之10(W/O)P摩尔重量〕。用这种方法淀积的P-PSG膜与常压下(AP-PSG)淀积的常规PSG膜比较,显示出良好的薄膜性能,如在热处理期间具有较强的抗裂性,保真的台阶覆盖和可控的压应力等。
Phosphorus silicate glass films deposited by plasma activated reaction system (P-PSG) were investigated. The basic characteristics of P-PSG corresponding to different deposition parameters were analyzed. In this plasma deposition method, deposition is performed using SiH 4, PH 3 and N 2 O as reaction gases, and P-PSG has a high deposition rate [about 10% (W / O) P mol]. The P-PSG film deposited in this way shows good film properties as compared with the conventional PSG film deposited at normal pressure (AP-PSG) such as strong crack resistance during heat treatment, fidelity Step coverage and controllable compressive stress.
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