一、引言排列密度是沉积薄膜的重要性质之一。研究排列密度不仅对薄膜光学、电学性质是重要的,而且对于它的机械特性和化学稳定性也是重要的。沉积薄膜一般是由固态材料加热汽化,然后在给定的基板上凝聚而成。由于薄膜的 I. Introduction Alignment density is one of the important properties of deposited films. Studying the alignment density is important not only for the optical and electrical properties of the film, but also for its mechanical properties and chemical stability. Deposition films are typically vaporized by solid state materials and then condensed on a given substrate. Due to the film’s