本文以氢气和丙酮为原料 ,采用电子增强热丝CVD法 ,在硅片 (10 0 )基体上沉积一层金刚石薄膜 ,并采用光刻法和湿式各向异性刻蚀技术制备出金刚石薄膜自支撑窗口试样。实验结果表明 ,所制备的金刚石薄膜自支撑窗口刻蚀彻底 ,形状规则 ,能够很好地满足鼓泡法的实验要求 ,对CVD金刚石薄膜力学性能的测量具有重要意义。 In this paper, hydrogen and acetone as raw materials, the use of electron-enhanced hot wire CVD method, the deposition of a thin film of silicon (10 0) substrate, and the use of photolithography and wet anisotropic etching technology to prepare the diamond film self-supporting Window sample. The experimental results show that the self-supporting diamond films prepared by this method have complete and regular shapes and can meet the experimental requirements of bubbling method well. It is of great significance to measure the mechanical properties of CVD diamond films.