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用溶胶-凝胶方法在Pt/Ti/SiO2/Si衬底上制备了Na+的不同浓度均匀掺杂和成分梯度掺杂(上梯度)钛酸锶钡(Ba0.25Sr0.75TiO3)薄膜.电性能测试表明随着均匀掺杂浓度的增加,薄膜介电常数和损耗都减小,而漏电流先减小(掺杂浓度小于2.5mol%时)后又逐渐增加.场发射扫描电镜分析表明,均匀掺杂浓度增加到2.5mol%后薄膜表面呈疏松多孔状结构,这可能是导致漏电流又逐渐增大的原因.Na+的上梯度掺杂避免了掺杂浓度增加到2.5mol%后薄膜生长过程中出现的孔洞现象,于是薄膜的综合电性能得到了进一步提高.深入、系统地分析了杂质不同分布方式对薄膜结构和性能有不同影响的原因.
Barium strontium titanate (Ba0.25Sr0.75TiO3) films with uniform doping and composition gradient of Na + were prepared on Pt / Ti / SiO2 / Si substrate by sol-gel method. The results show that with the increase of uniform doping concentration, the dielectric constant and loss of the films decrease, while the leakage current decreases first (the doping concentration is less than 2.5mol%) and then increases gradually.The field emission scanning electron microscopy analysis shows that the uniform When the doping concentration is increased to 2.5mol%, the surface of the film is porous and porous, which may be the cause of the leakage current increasing.The upper gradient doping of Na + avoids the growth of the film after the doping concentration is increased to 2.5mol% , The integrated electrical properties of the films have been further improved.An in-depth and systematic analysis of the reasons for the different effects of the different distribution modes of impurities on the structure and properties of the films has been made.