互联网的飞速发展对宽带通信提出的需求只能由光网络满足,这转而导致了前所未有的对光微机械系统(MEMS)的兴趣。从光纤光学的早期开始,人们就认识到微光学是MEMS应用的沃土。基于MEMS的产品在光网络应用领域如交换结构、可变衰减器、可调激光器及其它器件中具有本质上的性能价格优势。本文回顾了在光网络应用中的各种MEMS技术。 The rapid growth of the Internet The demand for broadband communications can only be met by optical networks, which in turn has led to an unprecedented interest in optical micro-mechanical systems (MEMS). From the early days of fiber optics, people realized that micro-optics is a fertile ground for MEMS applications. MEMS-based products have inherent performance price advantages in optical networking applications such as switching fabrics, variable attenuators, tunable lasers and other devices. This article reviews various MEMS technologies used in optical networking.