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为了研究MEMS(Micro Electro Mechanical Systems)冷气推力器的热性能,介绍了一种MEMS冷气推力器的设计和制作,该推力器体积小(40mm×20mm×1mm),重量轻(1g),功耗低。对推力器加热丝不同电压和环境下进行了热仿真,对组装到电路板上的推力器模块进行了热测试。结果表明:常温常压下,8V的驱动电压,经过230s后,推力器加热丝的温度可达到80℃以上,与仿真结果趋势相同,可预见真空中,8V电压下可满足推进剂对加热腔温度的需求。
In order to study the thermal performance of MEMS (Micro Electro Mechanical Systems) air-cooled thruster, a MEMS air-cooled thruster is designed and manufactured. The thruster has the advantages of small size (40mm × 20mm × 1mm), light weight low. The thermal simulation of the thruster heating wire under different voltage and environment was carried out and the thruster module assembled to the circuit board was tested. The results show that under normal temperature and pressure, the driving voltage of 8V, after 230s, the temperature of the heating wire of the thruster can reach more than 80 ℃, which is the same with the simulation result. It is foreseeable that under the voltage of 8V, The demand for temperature.