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利用印刷电路板加工工艺研制成了一种适于非金属目标位置检测的单片式电容传感器,工作原理是金属电极的近场效应。研究了传感器的阻抗频率特性以及传感器工作频率与检测系统灵敏度的关系,得到了使检测系统灵敏度最大的工作频率(1MHz)。用该传感器对36g/m2的胶片和10mm厚的玻璃体两种非金属目标位置进行检测。结果表明:在0.1mm量程内,检测系统的线性较好;在0.2mm量程内,非线性也不超过16.5%。
The use of printed circuit board processing technology developed into a non-metallic target position detection monolithic capacitive sensor, the working principle is the metal electrode near-field effect. The impedance frequency characteristics of the sensor and the relationship between the working frequency of the sensor and the sensitivity of the detection system are studied. The operating frequency (1MHz) that maximizes the sensitivity of the detection system is obtained. With this sensor, 36 g / m2 film and 10 mm thick vitreous body were tested for both non-metallic target locations. The results show that the detection system has good linearity within 0.1mm range and no more than 16.5% nonlinearity within 0.2mm range.