FeNi multilayer films were prepared by EB-PVD technique. A modified TG-DSCapparatus was used to measure their Curie temperatures, which were around 760°C,lower than that of pure Fe thin films. The easy magnetization axis was in-plane. Hightemperature annealing in vacuum decreased the coercivity sharply. The saturationmagnetization also changed with heat treatment. After annealing at the temperatureequal to the substrate temperature during deposition, the saturation magnetizationdecreased.