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介绍一种分析ａ－Ｓｉ掺杂效率的新方法．该法能够很好地解决ａ－Ｓｉ全掺杂范围内掺杂浓度和掺杂效率的计算问题，简便易行，为ａ－Ｓｉ掺杂性能研究和器件设计制造提供可靠的掺杂浓度和掺杂效率值．
A new method of analyzing a-Si doping efficiency is introduced. The method can well solve the calculation problem of the doping concentration and the doping efficiency in the whole a-Si doping range, is simple and easy, provides a reliable doping concentration and doping for a-Si doping performance research and device design and manufacture Miscellaneous efficiency value.