论文部分内容阅读
这里所说的“微小尺寸”是指1毫米以内,直到0.01微米为止,即10~(-3)～10~(-8)米间的尺寸。这一类工件,按照传统的办法,也是最直观最有效的方法是利用几何光学的原理,将工件轮廓按比例放大,再将工件图象除以放大倍数,即得工件实际尺寸。也就是说,利用光学投影仪或工具显微镜来测量。但是在使用这类可见光光学精密机械测量工件时,由于边缘不清晰而造成的误差不能不加以注视。德国光学家阿贝早就从衍射现象推导出光学系统的极限分辨本领d为:
As used herein, “small size” refers to a size within 1 millimeter until it reaches 0.01 micrometer, that is, 10 -3 to 10 -8 micrometer. This type of workpiece, in accordance with the traditional approach, but also the most intuitive and most effective way is to use the principle of geometric optics, the workpiece profile in proportion to enlarge, and then divided by the workpiece image magnification, the actual size of the workpiece. That is, it is measured using an optical projector or a tool microscope. However, in the use of such visible optical precision mechanical measurement of the workpiece, the margin due to the uncertainty caused by the error can not be ignored. German ophthalmologist Abe has long deduced from the diffraction phenomenon of the optical system’s ultimate resolution skills d: