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基于PDMS的微流控系统的键合封装技术需要PDMS表面具有良好的粘合力和亲水性,作为PDMS表面改性技术,等离子体处理工艺(Plasma)具有高效、快捷、操作简单等特点,但它存在“回复”和裂纹问题。文中介绍了一种结合Plasma和表面活性剂十二烷基硫酸钠(SDS)的二次处理工艺。先利用Plasma技术对PDMS表面进行无裂纹亲水处理,再利用十二烷基硫酸钠溶液对其表面进行二次处理。既可以避免PDMS表面出现裂纹,又可以使PDMS表面亲水性长久的保持。通过实验验证,两次处理后接触角减小为21°,表面粗糙度达到1.71 nm,且表面无裂纹,并经过键合测试后,经过二次处理的PDMS与玻璃和PDMS实现了长久的键合,验证了该工艺技术可行,为微流控系统的键合封装提供了技术基础。
PDMS-based microfluidic system bonding and packaging technology requires good surface adhesion and hydrophilicity of PDMS. As a PDMS surface modification technology, plasma treatment process (Plasma) has the characteristics of high efficiency, quickness and easy operation, But it exists “Reply” and crack problems. This paper describes a combination of Plasma and surfactant sodium dodecyl sulfate (SDS) secondary treatment process. The first use of Plasma technology for PDMS surface without crack hydrophilic treatment, and then the use of sodium dodecyl sulfate solution on the surface of the secondary treatment. It not only can avoid the crack on the surface of PDMS, but also can make PDMS surface hydrophilic for a long time. Experimental results show that the contact angle decreases to 21 ° and the surface roughness reaches 1.71 nm after two treatments, and the surface is not cracked. After the bonding test, PDMS and glass and PDMS after secondary treatment achieve long-term bond The results show that the technology is feasible and provide the technical basis for bonding and packaging microfluidic system.