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提出了一种测定YBCO(YBa2Cu3O7-x)高温超导薄膜湿法腐蚀启动时长的红外热像新方法。该方法的实质是利用YBCO腐蚀时必然有化学热吸收或释放,从而引起YBCO表面液膜温度变化这一特点,通过红外热像实时监测系统,采集液膜温度变化过程的红外热像,从而判断反应启动时长。理论分析和实验结果均表明,YBCO表面2 mm宽线性液膜是较为理想的监测对象,因其同时具备温度变化信息和空间分布信息,可以将线性液膜中心作为理想的观测特征点;由滑动腐蚀液滴形成残留线性液膜具有温度变化灵敏度高的特点,YBCO(衬底为LaAlO3)竖直放置,可以表面避免液膜重力对启动时长的影响,获得更为准确的监测数据。由线性液膜的横向剖面灰度变化得到在本实验条件下YBCO薄膜与体积比H3PO4∶H2O=1∶300腐蚀液的反应启动时长介于0.3~0.4 s之间。
A new infrared thermography method for determining the start-up time of wet etching of YBCO (YBa2Cu3O7-x) high-temperature superconducting thin films was proposed. The essence of this method is to use chemical heat absorption or release when YBCO is corroded, which causes the temperature of liquid film on YBCO surface to change. Through the infrared thermography real-time monitoring system, the infrared thermography of liquid film temperature change is collected to judge Response time to start. The theoretical analysis and experimental results show that the linear liquid film of 2 mm wide on YBCO surface is an ideal monitoring object. Because of the information of temperature change and spatial distribution, the linear liquid film center can be regarded as the ideal observation feature point. The residual linear liquid film formed by the eroded droplets has the characteristics of high sensitivity to temperature change. YBCO (substrate is LaAlO3) is placed vertically to avoid the influence of liquid film gravity on the startup time and obtain more accurate monitoring data. The change of the grayscale of the cross-section of the linear liquid film shows that the reaction time between the YBCO film and the volume ratio H3PO4: H2O = 1: 300 etching solution is between 0.3 and 0.4 s under the experimental conditions.