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Great interest in surface acoustic wave device based on diamond is attracted because diamond has the highest surface acoustic wave velocity of all substrates.In this paper,400 nm ZnO film was deposited on polycrystalline diamond wafer by magnetron sputtering.The experimental results indicate that highly c-axis oriented and fine-grain polycrystalline ZnO films have been obtained.100 nm Al thin film was deposited on ZnO/diamond by electron evaporation.Standard interdigital-transducers with the electrodes of 1.0μm width were fabricated on the Al film using photolithography and reactive ion etching (RIE) processes.A 2.48 GHz longitudinally-coupled double-mode surface acoustic wave filter has been successfully fabricated using the Al/ZnO/diamond structure.
Great interest in surface acoustic wave device based on diamond is attracted because diamond has the highest surface acoustic wave velocity of all substrates. In this paper, 400 nm ZnO film was deposited on polycrystalline diamond wafer by magnetron sputtering. The experimental results indicate that highly c -axis oriented and fine-grain polycrystalline ZnO films have been obtained.100 nm Al thin film was deposited on ZnO / diamond by electron evaporation.Standard interdigital-transducers with the electrodes of 1.0 μm width were fabricated on the Al film using photolithography and reactive ion etching (RIE) processes. A 2.48 GHz longitudinally-coupled double-mode surface acoustic wave filter has been successfully fabricated using the Al / ZnO / diamond structure.