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归纳了能量色散X射线荧光(EDXRF)光谱仪的主要部件及能谱处理算法的研究进展及现状,通过分别对比不同类型高压电源、X射线激发源和探测器在光谱仪上的使用,总结了X射线激发电压、X射线强度和探测器分辨率等对仪器灵敏度和分辨率等指标的影响。通过分别对比不同算法在能谱去噪、本底扣除、谱峰分解及荧光强度提取等方面的应用,分析了各种算法的适用范围,并比较了小波变换、人工神经网络和偏最小二乘法等在能谱分析中的独特优势。阐述了为提高仪器性能亟待解决的问题,并指出了EDXRF仪器的发展趋势及进一步研究该课题的必要性。
The research progress and current situation of the main components and energy spectrum processing algorithms of energy dispersive X-ray fluorescence (EDXRF) spectrometer are summarized. By comparing the use of different types of high voltage power supply, X-ray excitation source and detector on the spectrometer respectively, Excitation voltage, X-ray intensity and detector resolution on the instrument sensitivity and resolution and other indicators. By comparing the application of different algorithms in spectrum denoising, background subtraction, spectral peak decomposition and fluorescence intensity extraction, the applicability of various algorithms are analyzed respectively. The wavelet transform, artificial neural network and partial least squares Etc. In the energy spectrum analysis of the unique advantages. The problems to be solved in order to improve the performance of the instrument are expounded. The development trend of the EDXRF instrument and the necessity of further researching the subject are also pointed out.