1.前言硅片压力传感器是基于压敏电阻效应把所加流体压力转换为电信号。典型的是由薄的硅片和将杂质扩散到片上而制成的压敏电阻组成。对于这种型式的传感器,硅不仅用作扩散电阻的基底而且也是弹性材料。因为硅 1. Introduction Silicon wafer pressure sensors convert the applied fluid pressure into electrical signals based on varistor effects. It is typically composed of a thin silicon wafer and a varistor made by diffusing impurities onto the chip. For this type of sensor, silicon is used not only as a substrate for diffusion resistance but also as an elastic material. Because of silicon