【摘 要】
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The critical technology for fabrication of the micro-bridge structure based on amorphous silicon (a-Si) films is studied. As a key technology in the fabrication of the micro-bridge structure, the sacrificial layer technology, including the preparation of
【机 构】
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Micro-OptoelectricalSystemLaboratory,Xi'anTechnologicalUniversity,Xi'an710032,ChinaXi'anTechnolog
【出 处】
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ChineseOpticsLetters
论文部分内容阅读
The critical technology for fabrication of the micro-bridge structure based on amorphous silicon (a-Si) films is studied. As a key technology in the fabrication of the micro-bridge structure, the sacrificial layer technology, including the preparation of polyimide thin films (i.e., curing, wet etching, and plasma etching processes), is systematically researched, and a series of key parameters are obtained. An improved process °ow of self-supporting micro-bridge structure is established. Experimental results and scanning electron microscope (SEM) images show that the fabrication technology presented is simple and feasible. A 160×120 micro-bridge array is successfully fabricated using this method.
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