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本发明提供一种LED晶片的制造方法,在其工序上,可以轻易且有效地去除在形成氮化物类半导体层时所使用的蓝宝石基板。本发明的LED晶片的制造方法是用以制造具有氮化物类半导体层的LED晶片的方法,其特征为具有化学蚀刻工序:对于具有在
The present invention provides a method for producing an LED chip in which a sapphire substrate used for forming a nitride-based semiconductor layer can be easily and efficiently removed. The method for producing an LED chip according to the present invention is a method for producing an LED chip having a nitride-based semiconductor layer. The method includes a chemical etching step,