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采用LIBS-OPA对取自不同电迁移部位的金属钆棒的纵剖面进行了原位统计分布分析,探讨了电迁移工艺中不同位置处的杂质元素在其电迁移方向上的分布规律。发现在电迁移工艺上部Ti和Cu的偏析较为严重,而下部即阴极附近的杂质元素含量大大降低且其分布趋于均匀。Ti和Al两个元素在电迁移末端含量发生较大变化,出现了一条明显的分界线,说明金属钆中的某些成分组成发生了突变,因此导致其分布发生了较大改变。而Cu,Si,Mo和Fe强度也都发生了不同程度的下降。但其偏析度变化不明显。Ti和Mo是金属钆的原位分析中出现异常信号较多的元素,说明金属Gd中存在一些Ti和Mo的化合物。采用透射电镜对金属钆棒中的化合物进行了观察,其结果与LIBS-OPA统计的结果较为相符。
LIBS-OPA was used to analyze the longitudinal distribution of longitudinal sections of Gd rods from different electromigration sites. The distribution of impurity elements at different positions in electromigration was discussed. The segregation of Ti and Cu in the upper part of the electromigration process was found to be more serious, while the content of the impurity elements in the lower part, ie, the cathode, was greatly reduced and its distribution tended to be uniform. The contents of Ti and Al changed greatly at the end of electrotransport, and a clear demarcation line appeared, which indicated that the composition of some metal gadolinium changed abruptly, which resulted in the great change of its distribution. The intensity of Cu, Si, Mo and Fe also decreased to some extent. But its segregation change is not obvious. Ti and Mo are the elements with more anomalous signals in the in-situ analysis of gadolinium, indicating that there are some compounds of Ti and Mo in the metal Gd. Transmission electron microscopy was used to observe the compounds in the gadolinium rods. The results are in good agreement with the LIBS-OPA statistics.